|
Model
|
PDC-200/210/510
|
 PlasmaMode
|
PDC-200(RIEorDP)/ PDC-210(RIE and DP)
|
 MainUnit
|
|
Aluminumchamber
|
Internaldimension: 400mmW×250mmD×150mmH
|
|
Electrode
|
Parallelflatstageplate: 230mmW×170mmD
|
|
Vacuumgauge
|
Capacitancemanometer
|
|
Reactiongas system
|
Twosystems(Ar,O2)
|
|
Controller
|
Programmablecontroller
|
|
Display
|
LCDTouchpanelDisplay
|
|
Radio-FrequencyPower Supply
|
|
Input
|
PDC-200:AC100V,Single phase, 8A (50/60 Hz) / PDC-210: AC200V,Threephase,15A (50/60 Hz)
|
|
Radio-frequency output power
|
PDC-200:300W/PDC-210:500W
|
|
Referenceoscillator
|
Quartzoscillator
|
|
Oscillating frequency
|
13.56 MHz
|
|
Matchingadjustment
|
Automatictuning
|
|
Discharge System(Vacuum Pump) only PDC-210 / PDC200 Optional
|
|
Displacement
|
Total345liters/min.
|
|
Inputpower supply
|
Threephases,AC200V, 4A, 50/60 Hz / PDC-200Singlephase,AC100V,4A,(50/60Hz)
|
|
Inletconfiguration
|
NW25
|
|
Outletconfiguration
|
NW25
|
|
GasSystems
|
|
Purgegas
|
Nitrogen (N2)andaregulator (3 kgf/cm2) with a manometer
|
|
Reactiongas G1
|
Oxygen (O2)andamass flow controller (500 secm) / PDC-200:(200 secm)
|
|
Reactiongas G2
|
Argon (Ar)andamass flow controller (100 secm)
|
|
SafetyMechanisms
|
 SystemProtections
|
(1)WatchingVacuumPump and RF generater
Watching over current by Thermal Protector Magnetic relay.
(2) Product Quartz oscillator
When Matching unit have miss matching,protectquartzoscillator.
(3) Door Panel Inter lock
Build Inter lock switch.
|
|
Actions againsta trouble of the vacuum pump
|
Theplasmascrubbertakes the counteractions listed below and show anAlarmmessage onits display when something wrong happens on thevacuumpump.
*The main valve closes *The gas feed valve closes*Theisolationvalve closes *The oscillator stops outputting*Treatmentprocess issuspended *The Alarm buzzer starts sounding*Thetreatment processtimer stops.
|
|
REQUIREDUTILITIES
|
|
PowerSupply
|
|
Main unitwith vacuum pump
|
PDC-200: Single phases, AC100V,15A,50/60Hz
PDC-210: Three phases, AC200V, 15 A, 50/60Hz
(with an accessory power cable of 3 meters long,andexposedcrimp-style terminals of 8 millimeters long)
|
|
Gases
|
|
Purgegas
|
Nitrogen(N2)(Feedpressure: 2～7 kgf/cm2)
|
|
Reactiongas G1
|
Oxygen(O2)(Feedpressure: 1.5 kgf/cm2)
|
|
Reactiongas G2
|
Argon(Ar)(Feedpressure: 1.5 kgf/cm2)
|
|
Connectionport
|
1/4"swagelokjointbulkhead union (SS-400-61)
|
|
|
Note:Pressureregulators, filters and other protective devicesshall bepreparedby others.
|
 ConnectionDiameterof the Discharge Duct (andinletPort)
|
|
Vacuumpump's inlet port
|
NW25(withaflexible stainless steel hose of 1 meter long)
|
|
Vacuumpump's outlet port
|
NW25
|
|
|
Note:Everyporthas a connector designed foraflexiblehose.
|