產(chǎn)品[
大口徑立式爐
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產(chǎn)品名稱(chēng):
大口徑立式爐
產(chǎn)品型號(hào):
VFS
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大口徑立式爐Flagship model that has achieved semiconductor specification.
The semiconductor diffusion furnace has been modified to a larger scale For the flat panel display.
大口徑立式爐的詳細(xì)介紹
大口徑立式爐：
Flagship model that has achieved semiconductor specification.
The semiconductor diffusion furnace has been modified to a larger scale For the flat panel display.
Various kinds of process are available such as vacuum, various kinds of Gas atmosphere (Oxidization, reduction, neutral, & corrosion etc).
| Available glass size | | ~W730×L920mm |
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| Temperature range | RT~700℃ |
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| Temperature uniformity | ±3℃ |
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| Cleanliness | Class 1 (0.3μm) |
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| Applications | | Re-polyimide, Annealing, Baking |
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